Brunel University Research Archive(BURA) preserves and enables easy and open access to all
types of digital content. It showcases Brunel's research outputs.
Research contained within BURA is open access, although some publications may be subject
to publisher imposed embargoes. All awarded PhD theses are also archived on BURA.
Browsing by Subject Wafer inspection
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
|---|---|---|
| 2003 | A golden block based self-refining scheme for repetitive patterned wafer inspections | Guan, SU; Xie, P; Li, H |
| 2000 | A golden template self-generating method for patterned wafer inspection | Xie, P; Guan, SU |