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Title: Experimental design with integrated temperature sensors in MEMS: an example of application for rarefied gases
Authors: Vittoriosi, A
Brandner, JJ
Dittmeyer, R
3rd Micro and Nano Flows Conference (MNF2011)
Keywords: Integrated sensors;Temperature measurements;Gas flows;Slip flow
Issue Date: 2011
Publisher: Brunel University
Citation: 3rd Micro and Nano Flows Conference, Thessaloniki, Greece, 22-24 August 2011
Abstract: This paper presents a new MEMS experimental device with integrated temperature sensors. Conventional silicon planar techniques for the fabrication of microelectronic sensors have been used to realize a particular layout, which does not limit the material of the microstructures it can be used with. The study of rarefied gases has been chosen as case study for the validation of the local measuring system. In this work the attention will be focused on the description of the sensor functioning principles and on the presentation of the preliminary results obtained during the calibration procedures. The tests showed promising results for a future development of the sensor design.
Description: This paper was presented at the 3rd Micro and Nano Flows Conference (MNF2011), which was held at the Makedonia Palace Hotel, Thessaloniki in Greece. The conference was organised by Brunel University and supported by the Italian Union of Thermofluiddynamics, Aristotle University of Thessaloniki, University of Thessaly, IPEM, the Process Intensification Network, the Institution of Mechanical Engineers, the Heat Transfer Society, HEXAG - the Heat Exchange Action Group, and the Energy Institute.
ISBN: 978-1-902316-98-7
Appears in Collections:Brunel Institute for Bioengineering (BIB)
The Brunel Collection

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