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|Title: ||A golden template self-generating method for patterned wafer inspection|
|Authors: ||Xie, P|
|Keywords: ||Wafer inspection|
Image-to-image reference method
|Publication Date: ||2000|
|Publisher: ||Springer Berlin / Heidelberg|
|Citation: ||Machine Vision and Applications, 12(3): 149-156, Oct 2000|
|Abstract: ||This paper presents a novel golden template self-generating technique for detecting possible defects in periodic two-dimensional wafer images. A golden template of the patterned wafer image under inspection can be obtained from the wafer image itself and no other prior knowledge is needed. It is a bridge between the existing self-reference methods and image-to-image reference methods.
Spectral estimation is used in the first step to derive the periods of repeating patterns in both directions. Then a building block representing the structure of the patterns is extracted using interpolation to obtain sub-pixel resolution. After that, a new defect-free golden template is built based on the extracted building block. Finally, a pixel-to-pixel comparison is all we need to find out possible defects.
A comparison between the results of the proposed method and those of the previously published methods is presented.|
|Appears in Collections:||Electronic and Computer Engineering|
Dept of Electronic and Computer Engineering Research Papers
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