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DC Field | Value | Language |
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dc.contributor.author | Abu Ebayyeh, AARM | - |
dc.contributor.author | Danishvar, S | - |
dc.contributor.author | Mousavi, A | - |
dc.date.accessioned | 2021-12-11T13:00:43Z | - |
dc.date.available | 2021-12-11T13:00:43Z | - |
dc.date.issued | 2021-12-10 | - |
dc.identifier.citation | Abu Ebayyeh, A.A.R.M., Danishvar, S. and Mousavi, A. (2021) 'An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling,' IEEE Transactions on Semiconductor Manufacturing, 35 (1), pp. 50 - 59 (10). doi: 10.1109/TSM.2021.3134625. | en_US |
dc.identifier.issn | 0894-6507 | - |
dc.identifier.uri | https://bura.brunel.ac.uk/handle/2438/23723 | - |
dc.description.sponsorship | European Union’s Horizon 2020 Research and Innovation Program, IQONIC Project, Grant agreement No. 820677. | en_US |
dc.format.extent | 50 - 59 (10) | - |
dc.format.medium | Print-Electronic | - |
dc.language.iso | en_US | en_US |
dc.publisher | IEEE | en_US |
dc.rights | © Copyright 2021 The Author(s). Published by IEEE. This work is licensed under a Creative Commons Attribution 4.0 License. For more information, see https://creativecommons.org/licenses/by/4.0/ | - |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | - |
dc.subject | capsule network | en_US |
dc.subject | data augmentation | en_US |
dc.subject | deep learning | en_US |
dc.subject | defect detection | en_US |
dc.subject | generative adversarial network (GAN) | en_US |
dc.subject | pattern recognition | en_US |
dc.subject | semiconductor manufacturing | en_US |
dc.subject | wafer bin map (WBM) | en_US |
dc.title | An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling | en_US |
dc.type | Article | en_US |
dc.identifier.doi | https://doi.org/10.1109/TSM.2021.3134625 | - |
dc.relation.isPartOf | IEEE Transactions on Semiconductor Manufacturing | - |
pubs.issue | 1 | - |
pubs.publication-status | Published | - |
pubs.volume | 35 | - |
dc.identifier.eissn | 1558-2345 | - |
dc.rights.holder | The Author(s) | - |
Appears in Collections: | Dept of Electronic and Electrical Engineering Research Papers |
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