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http://bura.brunel.ac.uk/handle/2438/9650
Title: | Chromium coated silicon nitride electron beam exit window |
Authors: | Manivannan, N Balachandran, W Ribton, C Beleca, R Abbod, M Cox, M Anastasia, P |
Keywords: | Electron beam windows;Electron beam processing;Thin membrane;Metal coating |
Issue Date: | 2015 |
Publisher: | Elsevier |
Citation: | Vacuum, 113: 19 - 23, (March 2015) |
Abstract: | A Si3N4 membrane with a thin Cr coating is proposed and demonstrated as an electron beam exit window. On average, 85% electron power transmission efficiency was achieved with a 1 μm thick Si3N4 membrane coated with 1 μm thick Cr and the membrane sustained a beam current of up to 3 mA at 60 keV electron energy for the continuous operation of 3 min. However, for an uncoated membrane of same thickness, the average electron power transmission efficiency was 71% and the maximum beam current sustained was 800 μA. It was also shown that a one micron thick Si3N4 square membrane window of 10 mm × 10 mm could withstand a differential pressure of 1.3 bars. |
URI: | http://www.sciencedirect.com/science/article/pii/S0042207X14003844 http://bura.brunel.ac.uk/handle/2438/9650 |
DOI: | http://dx.doi.org/10.1016/j.vacuum.2014.11.024 |
ISSN: | 0042-207X |
Appears in Collections: | Dept of Electronic and Electrical Engineering Research Papers |
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