Browsing by Subject nanometrology
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	| Issue Date | Title | Author(s) | 
|---|---|---|
| 2013 | Multi-functional MEMSINEMS for Nanometrology Applications | Hao, L; Gallop, J; Stewart, M; Lees, K; Chen, J | 
| Issue Date | Title | Author(s) | 
|---|---|---|
| 2013 | Multi-functional MEMSINEMS for Nanometrology Applications | Hao, L; Gallop, J; Stewart, M; Lees, K; Chen, J |