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http://bura.brunel.ac.uk/handle/2438/9714| Title: | Multi-functional MEMSINEMS for Nanometrology Applications |
| Authors: | Hao, L Gallop, J Stewart, M Lees, K Chen, J |
| Keywords: | micro- and nano-electromechanical systems;excitation and readout methods;nanometrology |
| Issue Date: | 2013 |
| Publisher: | IEEE |
| Citation: | IEEE, pp. 1119 - 1124 |
| Abstract: | As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications. |
| URI: | http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=6721047 http://bura.brunel.ac.uk/handle/2438/9714 |
| Appears in Collections: | Brunel Design School Research Papers |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Fulltext.pdf | 334.57 kB | Adobe PDF | View/Open |
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