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Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Xie, P | - |
dc.contributor.author | Guan, SU | - |
dc.coverage.spatial | 19 | en |
dc.date.accessioned | 2007-08-02T09:28:26Z | - |
dc.date.available | 2007-08-02T09:28:26Z | - |
dc.date.issued | 2000 | - |
dc.identifier.citation | Machine Vision and Applications, 12(3): 149-156, Oct 2000 | en |
dc.identifier.issn | 0932-8092 | - |
dc.identifier.uri | http://bura.brunel.ac.uk/handle/2438/1091 | - |
dc.description.abstract | This paper presents a novel golden template self-generating technique for detecting possible defects in periodic two-dimensional wafer images. A golden template of the patterned wafer image under inspection can be obtained from the wafer image itself and no other prior knowledge is needed. It is a bridge between the existing self-reference methods and image-to-image reference methods. Spectral estimation is used in the first step to derive the periods of repeating patterns in both directions. Then a building block representing the structure of the patterns is extracted using interpolation to obtain sub-pixel resolution. After that, a new defect-free golden template is built based on the extracted building block. Finally, a pixel-to-pixel comparison is all we need to find out possible defects. A comparison between the results of the proposed method and those of the previously published methods is presented. | en |
dc.format.extent | 273208 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | en | - |
dc.publisher | Springer Berlin / Heidelberg | en |
dc.subject | Wafer inspection | en |
dc.subject | Golden template | - |
dc.subject | Spectral estimation | - |
dc.subject | PDI | - |
dc.subject | Image-to-image reference method | - |
dc.title | A golden template self-generating method for patterned wafer inspection | en |
dc.type | Research Paper | en |
dc.identifier.doi | http://dx.doi.org/10.1007/s001380050133 | - |
Appears in Collections: | Electronic and Electrical Engineering Dept of Electronic and Electrical Engineering Research Papers |
Files in This Item:
File | Description | Size | Format | |
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A Golden Template Self-generating Method for Patterned Wafer Inspection.pdf | 266.8 kB | Adobe PDF | View/Open |
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