1. Brunel University Research Archive
  2. College of Engineering, Design and Physical Sciences
  3. Brunel Design School
  4. Brunel Design School Research Papers
Please use this identifier to cite or link to this item: http://bura.brunel.ac.uk/handle/2438/9714
Full metadata record
DC FieldValueLanguage
dc.contributor.authorHao, L-
dc.contributor.authorGallop, J-
dc.contributor.authorStewart, M-
dc.contributor.authorLees, K-
dc.contributor.authorChen, J-
dc.coverage.spatialBeijing, China-
dc.coverage.spatialBeijing, China-
dc.date.accessioned2015-01-13T11:56:17Z-
dc.date.available2015-01-13T11:56:17Z-
dc.date.issued2013-
dc.identifier.citationIEEE, pp. 1119 - 1124en_US
dc.identifier.urihttp://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=6721047-
dc.identifier.urihttp://bura.brunel.ac.uk/handle/2438/9714-
dc.description.abstractAs micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.en_US
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.source2013 13th IEEE Conference on Nanotechnology (IEEE-NANO)-
dc.source2013 13th IEEE Conference on Nanotechnology (IEEE-NANO)-
dc.subjectmicro- and nano-electromechanical systemsen_US
dc.subjectexcitation and readout methodsen_US
dc.subjectnanometrologyen_US
dc.titleMulti-functional MEMSINEMS for Nanometrology Applicationsen_US
dc.typeArticleen_US
pubs.finish-date2013-08-08-
pubs.finish-date2013-08-08-
pubs.start-date2013-08-05-
pubs.start-date2013-08-05-
pubs.organisational-data/Brunel-
pubs.organisational-data/Brunel/Brunel Staff by College/Department/Division-
pubs.organisational-data/Brunel/Brunel Staff by College/Department/Division/College of Engineering, Design and Physical Sciences-
pubs.organisational-data/Brunel/Brunel Staff by College/Department/Division/College of Engineering, Design and Physical Sciences/Dept of Mechanical, Aerospace and Civil Engineering-
pubs.organisational-data/Brunel/Brunel Staff by College/Department/Division/College of Engineering, Design and Physical Sciences/Dept of Mechanical, Aerospace and Civil Engineering/Mechanical and Aerospace Engineering-
pubs.organisational-data/Brunel/Brunel Staff by Institute/Theme-
pubs.organisational-data/Brunel/Brunel Staff by Institute/Theme/Institute of Energy Futures-
pubs.organisational-data/Brunel/Brunel Staff by Institute/Theme/Institute of Energy Futures/Advanced Engines and Biofuels-
pubs.organisational-data/Brunel/University Research Centres and Groups-
pubs.organisational-data/Brunel/University Research Centres and Groups/Brunel Business School - URCs and Groups-
pubs.organisational-data/Brunel/University Research Centres and Groups/Brunel Business School - URCs and Groups/Centre for Research into Entrepreneurship, International Business and Innovation in Emerging Markets-
pubs.organisational-data/Brunel/University Research Centres and Groups/School of Health Sciences and Social Care - URCs and Groups-
pubs.organisational-data/Brunel/University Research Centres and Groups/School of Health Sciences and Social Care - URCs and Groups/Brunel Institute for Ageing Studies-
pubs.organisational-data/Brunel/University Research Centres and Groups/School of Health Sciences and Social Care - URCs and Groups/Brunel Institute of Cancer Genetics and Pharmacogenomics-
pubs.organisational-data/Brunel/University Research Centres and Groups/School of Health Sciences and Social Care - URCs and Groups/Centre for Systems and Synthetic Biology-
Appears in Collections:Brunel Design School Research Papers

Files in This Item:
File Description SizeFormat 
Fulltext.pdf334.57 kBAdobe PDFView/Open
Show simple item record


Items in BURA are protected by copyright, with all rights reserved, unless otherwise indicated.