Please use this identifier to cite or link to this item:
http://bura.brunel.ac.uk/handle/2438/1091
Title: | A golden template self-generating method for patterned wafer inspection |
Authors: | Xie, P Guan, SU |
Keywords: | Wafer inspection;Golden template;Spectral estimation;PDI;Image-to-image reference method |
Issue Date: | 2000 |
Publisher: | Springer Berlin / Heidelberg |
Citation: | Machine Vision and Applications, 12(3): 149-156, Oct 2000 |
Abstract: | This paper presents a novel golden template self-generating technique for detecting possible defects in periodic two-dimensional wafer images. A golden template of the patterned wafer image under inspection can be obtained from the wafer image itself and no other prior knowledge is needed. It is a bridge between the existing self-reference methods and image-to-image reference methods. Spectral estimation is used in the first step to derive the periods of repeating patterns in both directions. Then a building block representing the structure of the patterns is extracted using interpolation to obtain sub-pixel resolution. After that, a new defect-free golden template is built based on the extracted building block. Finally, a pixel-to-pixel comparison is all we need to find out possible defects. A comparison between the results of the proposed method and those of the previously published methods is presented. |
URI: | http://bura.brunel.ac.uk/handle/2438/1091 |
DOI: | http://dx.doi.org/10.1007/s001380050133 |
ISSN: | 0932-8092 |
Appears in Collections: | Electronic and Electrical Engineering Dept of Electronic and Electrical Engineering Research Papers |
Files in This Item:
File | Description | Size | Format | |
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A Golden Template Self-generating Method for Patterned Wafer Inspection.pdf | 266.8 kB | Adobe PDF | View/Open |
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