Test structures to characterise a novel circuit fabrication technique that uses offset lithography

Abstract

This paper reports on the use of microelectronic test structures to characterise a novel fabrication technique for thin-film electronic circuit boards. In this technology, circuit tracks are formed on paper-like substrates by depositing films of a metal-loaded ink via a standard lithographic printing process. Sheet resistance and line width are electrically evaluated and these quantities are compared with optical and surface profiling measurements.